Page 38 - LOT Quantum Design Product guide

Fizeau Interferometers

From Zygo Corporation

Zygo Corporation is a worldwide supplier of optical metrology instruments,
high precision optical components, and complex electro-optical systems
design and manufacturing services.

Dynafiz - dynamic laser interferometer – The Dynafiz is a highly optimized optical intrument
designed specifically for performing accurate and high-resolution metrology of optics in the
presence of air turbulence and extreme vibrations.

Features:
• Dynamic acquisition in turbulent air and extreme vibrations
• Capture live data (instantaneous measurements)
OPTICS • Movie mode captures wavefront changes over time
• LivePhase enables real-time Zernike analysis

Zygo Verifire XPZ - traditional mechanical phase modulation – The Verifire XPZ uses the precision
of traditional mechanical phase modulation to show fine measurement details on your parts with
excellent accuracy and repeatability. During a measurement, the interferometric cavity length
is precisely modulated while a 640x480 pixels camera (1K camera in option) captures several
fringe images, which are analyzed by MetroPro or MX (new software) to create a highly detailed
measurement of the optical surface being tested. Optional high-resolution 1K camera allows to see
until 380 fringes @ zoom 1X.
Verifire QPZ - fast mechanical phase modulation – The Verifire QPZ is Zygo’s newest Fizeau
interferometer designed for uncompromised production metrology. With a true laser Fizeau
design, the Verifire QPZ utilizes proprietary methods (QPSI) to ensure reliable “ripple-free” phase
measurements in vibration prone environments. Compatible with all standard Zygo accessories
the Verifire QPZ is the one interferometric solution that can be trusted to provide high-resolution
37 (standard camera 1024x1024 pixels to see 380 fringes @ zoom 1X) and accurate surface
metrology in both production and QC environments - without compromise.