Page 17 - LOT Quantum Design Product guide

Spectroscopic Ellipsometers

For thin films characterization

M-2000 – for fast in-situ or ex-situ ellipsometry – The M-2000 line of spectroscopic
ellipsometers is engineered to meet the diverse demands of thin film characterization. An
advanced optical design, wide spectral range, and fast data acquisition make it an extremely
powerful and versatile tool. The M-2000 delivers both speed and accuracy. The patented RCE
technology combines rotating compensator ellipsometry with high-speed CCD detection to
collect data from the entire spectrum (hundreds of wavelengths from 193 to 1690 nm) in a
fraction of a second with a wide array of ex-situ configurations, as well in-situ configurations for
real-time process monitoring and control for a wide range of deposition process chambers.

VASE – The ultimate research ellipsometer – The VASE is Woollam’s most accurate and versatile
ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers,
metals and multi-layers. It combines high accuracy and precision with a wide spectral range
up to 193 to 3200nm. Variable wavelengths and automated angle of incidence allow flexible
measurement capabilities. A wide range of options is available.

Alpha-SE – Entry level ellipsometer. Powerful & easy-to-use, at an affordable price – For fast MATERIALS SCIENCE
measurements of thin films thickness and refractive index within the visible spectrum (380-
900 nm), this ellipsometer allows you to mount a sample, select the pre-built model and
press “measure” for instant results. It uses the same CompleteEASE software as the RC2 and
M-2000, so there is no compromise in its resolving power. You have your answers within
seconds.

IR-VASE – Infrared ellipsometer, up to 33 µm – The IR-VASE remains the most accurate method
for optically characterizing thin films in the infrared. It provides accurate optical constants
(n and k) from 1.7 to 33 microns and beyond, as well as film thickness, chemical information,
semiconductor doping levels, and phonon absorption spectra. 16