Page 12 - LOT Quantum Design Product guide

Optical Surface profilers

From Zygo Corporation

Optical Surface profilers from Zygo are white light interferometer systems,
offering fast, non-contact, high-precision 3D metrology of surface features.
NexView - 3D optical surface profiler
NexView CSI microscope is an optical 3D surface profiler that excels at meauring all surfaces – from
super-smooth to very rough, with sub-nanometer precision, independent of field of view.
Measurement types include flatness, roughness, large steps and segments, thin films, and steep slopes,
with feature heights ranging < 1 nm up to 2000 µm. With 200 mm XY stage and motorized filter tray
and motorized zoom tubes and aperture stop.
Features:
MATERIALS SCIENCE Zegage - 3D optical profiler for topography and roughness
• Smart PSI for subangstrom roughness
• SureScan for height scans up to 20 mm, high slopes up to 86°
• Thin film thickness measurement > 400 nm
• True color measurements
• High end CSI ISO 25178 compliant

Zygo Zegage is a vibration-resistant CSI 3D optical profiler, for machined surface metrology and
process control on the production floor. ISO 25178-compliant texture results ensure correlation to stylus
metrology.
NewView 8000 - White light interferometer for production and R&D
The NewView 8200 and 8300 white light interferometers (3D CSI profilometers) are powerful tools
for characterizing and quantifying surface roughness, step heights (topography), flatness, critical
dimensions, and other topographic features like cones with excellent precision and accuracy. All
measurements are nondestructive, fast, and require no sample preparation. Profile heights ranging from
11 < 1 nm up to 20000 µm at high speeds, independent of surface texture, magnification of feature height!