Page 16 - LOT Quantum Design Product guide

Spectroscopic Ellipsometers

For thin films characterization

J.A. Woollam & Co. is the main market leader in Spectroscopic Ellipsometry.
Their ellipsometers cover the widest wavelength range from 140 nm to 33 μm or
can capture data simultaneously from all wavelengths in a fraction of a second.

J.A. Woollam & Co. ellipsometers have the widest choice of ellipsometers for any thin films application,
including
• Semiconductor
• Material science
• Flat panel display
• Biotechnology
MATERIALS SCIENCE all aspects of technical support. • Chemical composition
With the most extensive upgrade options and powerful ellipsometry software, J.A. Woollam & Co. retains
its position as the leader in ellipsometry for performance, ease of use, advanced analysis, reliability and

Film properties measured:
• Film thickness
• Refractive index
• Crystallinity
• Anisotropy
• Surface roughness
• Uniformity
• Interfacial mixing/grading
RC2 - the next generation of ellipsometry – The RC2 design builds on 25 years of experience.
It combines the best features of previous models with innovative new technology, including dual
rotating compensators, achromatic compensator design, advanced light source, next generation
spectrometer design and all 16 elements of the Mueller Matrix measured. The RC2 has the power
to resolve all polarization-effects from any complex sample that are anisotropic and/or depolarizing.
15 It is a near-universal solution for the diverse applications of spectroscopic ellipsometry.